Innovation
3 patent families (3 granted) — focus: Physics & computing; filing pace dormant. Cited 106 times.
| Year | Filings |
|---|---|
| 2012 | 1 |
Flip chip and wafer inspection equipment
3 patent families (3 granted) — focus: Physics & computing; filing pace dormant. Cited 106 times.
| Year | Filings |
|---|---|
| 2012 | 1 |