Innovation
22 patent families (22 granted) — focus: Physics & computing, Electricity & electronics; filing pace dormant. Cited 469 times.
| Year | Filings |
|---|---|
| 2012 | 1 |
Manufacturer of optical metrology systems for thin film and scatterometry applications
22 patent families (22 granted) — focus: Physics & computing, Electricity & electronics; filing pace dormant. Cited 469 times.
| Year | Filings |
|---|---|
| 2012 | 1 |